Instrumental function of the SPECS XPS system
Abstract
A simple method for the energy resolution measurement of a spectrometer, working in the fixed analyser transmission mode, is proposed and used to determine the resolution of a SPECS Phoibos 100 spectrometer, being a part of an X-ray Photoelectron Spectroscopy (XPS) setup. The spectrometer resolution was obtained from the 0 is photoelectron line profiles, taken from the oxidized boron-doped silicon single crystal vs. the analyzer pass energy. The measurements were performed for two entrance slits having respective widths of 1 mm and 7 mm. An excellent agreement with the theoretical expectations was obtained for the narrower slit, showing linear dependence on the pass energy. As for the wider slit, agreement with theory is achieved only for lower pass energies. At higher pass energies, the resolution shows non-linear behaviour and even saturation, while the analyzer transmission continues to grow. The instrumental function of the whole XPS system is determined as a convolution of the spe...ctrometer instrumental function and the X-ray energy profile. The usefulness of the total instrumental function for the analysis of valence band spectra was also tested. For that purpose, a novel deconvolution procedure is introduced, giving a possibility to analytically calculate the position of the valence band maximum, providing excellent agreement in the case of high resolution spectra. When the valence band spectra are taken in lower resolution, deconvolution efficiently reduces the spectrum deviations due to the lower resolution, although the valence band maximum determination is less precise. (C) 2017 Elsevier B.V. All rights reserved.
Keywords:
XPS / Electron spectroscopy / Instrumental function / Energy resolution / Deconvolution / Valence band maximumSource:
Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2017, 398, 48-55Funding / projects:
DOI: 10.1016/j.nimb.2017.02.071
ISSN: 0168-583X; 1872-9584
WoS: 000400222700008
Scopus: 2-s2.0-85015669473
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Institution/Community
VinčaTY - JOUR AU - Popović, Maja AU - Potočnik, Jelena AU - Bundaleski, Nenad AU - Rakočević, Zlatko Lj. PY - 2017 UR - https://vinar.vin.bg.ac.rs/handle/123456789/1537 AB - A simple method for the energy resolution measurement of a spectrometer, working in the fixed analyser transmission mode, is proposed and used to determine the resolution of a SPECS Phoibos 100 spectrometer, being a part of an X-ray Photoelectron Spectroscopy (XPS) setup. The spectrometer resolution was obtained from the 0 is photoelectron line profiles, taken from the oxidized boron-doped silicon single crystal vs. the analyzer pass energy. The measurements were performed for two entrance slits having respective widths of 1 mm and 7 mm. An excellent agreement with the theoretical expectations was obtained for the narrower slit, showing linear dependence on the pass energy. As for the wider slit, agreement with theory is achieved only for lower pass energies. At higher pass energies, the resolution shows non-linear behaviour and even saturation, while the analyzer transmission continues to grow. The instrumental function of the whole XPS system is determined as a convolution of the spectrometer instrumental function and the X-ray energy profile. The usefulness of the total instrumental function for the analysis of valence band spectra was also tested. For that purpose, a novel deconvolution procedure is introduced, giving a possibility to analytically calculate the position of the valence band maximum, providing excellent agreement in the case of high resolution spectra. When the valence band spectra are taken in lower resolution, deconvolution efficiently reduces the spectrum deviations due to the lower resolution, although the valence band maximum determination is less precise. (C) 2017 Elsevier B.V. All rights reserved. T2 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms T1 - Instrumental function of the SPECS XPS system VL - 398 SP - 48 EP - 55 DO - 10.1016/j.nimb.2017.02.071 ER -
@article{ author = "Popović, Maja and Potočnik, Jelena and Bundaleski, Nenad and Rakočević, Zlatko Lj.", year = "2017", abstract = "A simple method for the energy resolution measurement of a spectrometer, working in the fixed analyser transmission mode, is proposed and used to determine the resolution of a SPECS Phoibos 100 spectrometer, being a part of an X-ray Photoelectron Spectroscopy (XPS) setup. The spectrometer resolution was obtained from the 0 is photoelectron line profiles, taken from the oxidized boron-doped silicon single crystal vs. the analyzer pass energy. The measurements were performed for two entrance slits having respective widths of 1 mm and 7 mm. An excellent agreement with the theoretical expectations was obtained for the narrower slit, showing linear dependence on the pass energy. As for the wider slit, agreement with theory is achieved only for lower pass energies. At higher pass energies, the resolution shows non-linear behaviour and even saturation, while the analyzer transmission continues to grow. The instrumental function of the whole XPS system is determined as a convolution of the spectrometer instrumental function and the X-ray energy profile. The usefulness of the total instrumental function for the analysis of valence band spectra was also tested. For that purpose, a novel deconvolution procedure is introduced, giving a possibility to analytically calculate the position of the valence band maximum, providing excellent agreement in the case of high resolution spectra. When the valence band spectra are taken in lower resolution, deconvolution efficiently reduces the spectrum deviations due to the lower resolution, although the valence band maximum determination is less precise. (C) 2017 Elsevier B.V. All rights reserved.", journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms", title = "Instrumental function of the SPECS XPS system", volume = "398", pages = "48-55", doi = "10.1016/j.nimb.2017.02.071" }
Popović, M., Potočnik, J., Bundaleski, N.,& Rakočević, Z. Lj.. (2017). Instrumental function of the SPECS XPS system. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 398, 48-55. https://doi.org/10.1016/j.nimb.2017.02.071
Popović M, Potočnik J, Bundaleski N, Rakočević ZL. Instrumental function of the SPECS XPS system. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2017;398:48-55. doi:10.1016/j.nimb.2017.02.071 .
Popović, Maja, Potočnik, Jelena, Bundaleski, Nenad, Rakočević, Zlatko Lj., "Instrumental function of the SPECS XPS system" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 398 (2017):48-55, https://doi.org/10.1016/j.nimb.2017.02.071 . .