Effects of 200 keV Ar-ions irradiation on the structural and optical properties of reactively sputtered CrN films
Само за регистроване кориснике
2016
Чланак у часопису (Објављена верзија)
,
© 2016 Elsevier B.V.
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Modification in structural and optical properties of chromium-nitride (CrN) films induced by argon ion irradiation and thermal annealings were investigated using various experimental techniques. CrN films deposited by d.c. reactive sputtering on Si substrate were implanted with 200 keV argon ions, at fluences of 5-20 x 10(15) ions/cm(2). As-implanted samples were then annealed in vacuum, for 2 h at 700 degrees C. Rutherford backscattering spectrometry, X-ray diffraction, cross-sectional (high-resolution) transmission electron microscopy and spectroscopic ellipsometry (SE) measurements were carried out in order to study structural and optical properties of the layers. After irradiation with 200 keV Ar ions a damaged surface layer of nanocrystalline structure was generated, which extended beyond the implantation profile, but left an undamaged bottom zone. Partial loss of columnar structure observed in implanted samples was recovered after annealing at 700 degrees C and CrN started to dec...ompose to Cr2N. This layer geometry determined from transmission electron microscopy was inferred in the analysis of SE data using the combined Drude and Tauc-Lorentz model, and the variation of the optical bandgap was deduced. The results are discussed on the basis of the changes induced in the microstructure. It was found that the optical properties of the layers are strongly dependent on the defects concentration of CrN. (C) 2016 Elsevier B.V. All rights reserved.
Кључне речи:
Ion implantation / Chromium nitrides / Spectroscopic ellipsometry / Thermal annealing / Optical propertiesИзвор:
Optical Materials, 2016, 62, 57-63Финансирање / пројекти:
- Функционални, функционализовани и усавршени нано материјали (RS-45005)
- Deutsche Forschungsgemeinschaft [436 SER 113/2]
DOI: 10.1016/j.optmat.2016.09.047
ISSN: 0925-3467; 1873-1252
WoS: 000390735400010
Scopus: 2-s2.0-84988584753
Колекције
Институција/група
VinčaTY - JOUR AU - Novaković, Mirjana M. AU - Popović, Maja AU - Zhang, Kun AU - Rakočević, Zlatko Lj. AU - Bibić, Nataša M. PY - 2016 UR - https://vinar.vin.bg.ac.rs/handle/123456789/1350 AB - Modification in structural and optical properties of chromium-nitride (CrN) films induced by argon ion irradiation and thermal annealings were investigated using various experimental techniques. CrN films deposited by d.c. reactive sputtering on Si substrate were implanted with 200 keV argon ions, at fluences of 5-20 x 10(15) ions/cm(2). As-implanted samples were then annealed in vacuum, for 2 h at 700 degrees C. Rutherford backscattering spectrometry, X-ray diffraction, cross-sectional (high-resolution) transmission electron microscopy and spectroscopic ellipsometry (SE) measurements were carried out in order to study structural and optical properties of the layers. After irradiation with 200 keV Ar ions a damaged surface layer of nanocrystalline structure was generated, which extended beyond the implantation profile, but left an undamaged bottom zone. Partial loss of columnar structure observed in implanted samples was recovered after annealing at 700 degrees C and CrN started to decompose to Cr2N. This layer geometry determined from transmission electron microscopy was inferred in the analysis of SE data using the combined Drude and Tauc-Lorentz model, and the variation of the optical bandgap was deduced. The results are discussed on the basis of the changes induced in the microstructure. It was found that the optical properties of the layers are strongly dependent on the defects concentration of CrN. (C) 2016 Elsevier B.V. All rights reserved. T2 - Optical Materials T1 - Effects of 200 keV Ar-ions irradiation on the structural and optical properties of reactively sputtered CrN films VL - 62 SP - 57 EP - 63 DO - 10.1016/j.optmat.2016.09.047 ER -
@article{ author = "Novaković, Mirjana M. and Popović, Maja and Zhang, Kun and Rakočević, Zlatko Lj. and Bibić, Nataša M.", year = "2016", abstract = "Modification in structural and optical properties of chromium-nitride (CrN) films induced by argon ion irradiation and thermal annealings were investigated using various experimental techniques. CrN films deposited by d.c. reactive sputtering on Si substrate were implanted with 200 keV argon ions, at fluences of 5-20 x 10(15) ions/cm(2). As-implanted samples were then annealed in vacuum, for 2 h at 700 degrees C. Rutherford backscattering spectrometry, X-ray diffraction, cross-sectional (high-resolution) transmission electron microscopy and spectroscopic ellipsometry (SE) measurements were carried out in order to study structural and optical properties of the layers. After irradiation with 200 keV Ar ions a damaged surface layer of nanocrystalline structure was generated, which extended beyond the implantation profile, but left an undamaged bottom zone. Partial loss of columnar structure observed in implanted samples was recovered after annealing at 700 degrees C and CrN started to decompose to Cr2N. This layer geometry determined from transmission electron microscopy was inferred in the analysis of SE data using the combined Drude and Tauc-Lorentz model, and the variation of the optical bandgap was deduced. The results are discussed on the basis of the changes induced in the microstructure. It was found that the optical properties of the layers are strongly dependent on the defects concentration of CrN. (C) 2016 Elsevier B.V. All rights reserved.", journal = "Optical Materials", title = "Effects of 200 keV Ar-ions irradiation on the structural and optical properties of reactively sputtered CrN films", volume = "62", pages = "57-63", doi = "10.1016/j.optmat.2016.09.047" }
Novaković, M. M., Popović, M., Zhang, K., Rakočević, Z. Lj.,& Bibić, N. M.. (2016). Effects of 200 keV Ar-ions irradiation on the structural and optical properties of reactively sputtered CrN films. in Optical Materials, 62, 57-63. https://doi.org/10.1016/j.optmat.2016.09.047
Novaković MM, Popović M, Zhang K, Rakočević ZL, Bibić NM. Effects of 200 keV Ar-ions irradiation on the structural and optical properties of reactively sputtered CrN films. in Optical Materials. 2016;62:57-63. doi:10.1016/j.optmat.2016.09.047 .
Novaković, Mirjana M., Popović, Maja, Zhang, Kun, Rakočević, Zlatko Lj., Bibić, Nataša M., "Effects of 200 keV Ar-ions irradiation on the structural and optical properties of reactively sputtered CrN films" in Optical Materials, 62 (2016):57-63, https://doi.org/10.1016/j.optmat.2016.09.047 . .