Influence of thin oxide layer to photoacoustic signal of nano-mechanical structures
Аутори
Đorđević, Katarina Lj.Galović, Slobodanka
Dragaš, Milica A.
Markushev, Dragana K.
Markushev, Dragan D.
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Nano mechanical structures (NEMS) are being developed for application in pressure and temperature sensors. They consist of a very thin oxide layer on a silicon wafer. This layer is placed to improve their sensitivity to pressure changes. In this paper, it was investigated how much this layer affects the physical properties of such structures. In the research, the photoacoustic gas microphone experimental measurement method was applied and neural networks were developed for solving the inverse photoacoustic problem. The obtained results show that controlling the thickness of the oxide layer can be done by engineering the thermal elastic and optical properties of the NEMS.
Извор:
PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade, 2023, 38-38Издавач:
- Belgrade : Vinča Institute of Nuclear Sciences
Напомена:
- IX International School and Conference on Photonics : PHOTONICA2023 : book of abstracts; August 28 - September 1, 2023; Belgrade
Колекције
Институција/група
VinčaTY - CONF AU - Đorđević, Katarina Lj. AU - Galović, Slobodanka AU - Dragaš, Milica A. AU - Markushev, Dragana K. AU - Markushev, Dragan D. PY - 2023 UR - https://vinar.vin.bg.ac.rs/handle/123456789/11800 AB - Nano mechanical structures (NEMS) are being developed for application in pressure and temperature sensors. They consist of a very thin oxide layer on a silicon wafer. This layer is placed to improve their sensitivity to pressure changes. In this paper, it was investigated how much this layer affects the physical properties of such structures. In the research, the photoacoustic gas microphone experimental measurement method was applied and neural networks were developed for solving the inverse photoacoustic problem. The obtained results show that controlling the thickness of the oxide layer can be done by engineering the thermal elastic and optical properties of the NEMS. PB - Belgrade : Vinča Institute of Nuclear Sciences C3 - PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade T1 - Influence of thin oxide layer to photoacoustic signal of nano-mechanical structures SP - 38 EP - 38 UR - https://hdl.handle.net/21.15107/rcub_vinar_11800 ER -
@conference{ author = "Đorđević, Katarina Lj. and Galović, Slobodanka and Dragaš, Milica A. and Markushev, Dragana K. and Markushev, Dragan D.", year = "2023", abstract = "Nano mechanical structures (NEMS) are being developed for application in pressure and temperature sensors. They consist of a very thin oxide layer on a silicon wafer. This layer is placed to improve their sensitivity to pressure changes. In this paper, it was investigated how much this layer affects the physical properties of such structures. In the research, the photoacoustic gas microphone experimental measurement method was applied and neural networks were developed for solving the inverse photoacoustic problem. The obtained results show that controlling the thickness of the oxide layer can be done by engineering the thermal elastic and optical properties of the NEMS.", publisher = "Belgrade : Vinča Institute of Nuclear Sciences", journal = "PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade", title = "Influence of thin oxide layer to photoacoustic signal of nano-mechanical structures", pages = "38-38", url = "https://hdl.handle.net/21.15107/rcub_vinar_11800" }
Đorđević, K. Lj., Galović, S., Dragaš, M. A., Markushev, D. K.,& Markushev, D. D.. (2023). Influence of thin oxide layer to photoacoustic signal of nano-mechanical structures. in PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade Belgrade : Vinča Institute of Nuclear Sciences., 38-38. https://hdl.handle.net/21.15107/rcub_vinar_11800
Đorđević KL, Galović S, Dragaš MA, Markushev DK, Markushev DD. Influence of thin oxide layer to photoacoustic signal of nano-mechanical structures. in PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade. 2023;:38-38. https://hdl.handle.net/21.15107/rcub_vinar_11800 .
Đorđević, Katarina Lj., Galović, Slobodanka, Dragaš, Milica A., Markushev, Dragana K., Markushev, Dragan D., "Influence of thin oxide layer to photoacoustic signal of nano-mechanical structures" in PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade (2023):38-38, https://hdl.handle.net/21.15107/rcub_vinar_11800 .