Transmission pulse photoacoustic set-up for characterization of solids
Аутори
Đorđević, Katarina Lj.Galović, Slobodanka
Nešić, Mioljub
Todorović, D.
Popović, Marica
Markushev, Dragan D.
Markushev, Dragana K.
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Laboratory-built measuring device, based on pulse photoacoustic (PA) effect, which allows the measurement of optical and acoustic signals in time domain, is presented. The experimental setup is described and the device specifications are given in detail. Optical and PA signals are measured in a time range from 10 μs to 10 s, for different samples and conditions. As an example, the experimental results for Si square membrane (Si chip with 5 x 5 mm frame and 3 × 3 mm square membrane, 32 μm thick, used in micromechanic devices) are presented. The square membrane Si chips were prepared by wet anisotropic bulk micromachining process. The applicability of the measured PA signal in the characterization of semiconductors and micromechanical structures is discussed.
Кључне речи:
photoacoustic / photothermal / time-domain photoacoustics / dynamic and relaxation processes / micromechanical structureИзвор:
InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina, 2022, 161-164Издавач:
- Istočno Sarajevo : Elektrotehnički fakultet
Финансирање / пројекти:
- Министарство науке, технолошког развоја и иновација Републике Србије, институционално финансирање - 200017 (Универзитет у Београду, Институт за нуклеарне науке Винча, Београд-Винча) (RS-MESTD-inst-2020-200017)
Напомена:
- InfoTeh-Jahorina : 21st International Symposium INFOTEH-JAHORINA, March 16-18, 2022; Jahorina
Институција/група
VinčaTY - CONF AU - Đorđević, Katarina Lj. AU - Galović, Slobodanka AU - Nešić, Mioljub AU - Todorović, D. AU - Popović, Marica AU - Markushev, Dragan D. AU - Markushev, Dragana K. PY - 2022 UR - https://vinar.vin.bg.ac.rs/handle/123456789/10962 AB - Laboratory-built measuring device, based on pulse photoacoustic (PA) effect, which allows the measurement of optical and acoustic signals in time domain, is presented. The experimental setup is described and the device specifications are given in detail. Optical and PA signals are measured in a time range from 10 μs to 10 s, for different samples and conditions. As an example, the experimental results for Si square membrane (Si chip with 5 x 5 mm frame and 3 × 3 mm square membrane, 32 μm thick, used in micromechanic devices) are presented. The square membrane Si chips were prepared by wet anisotropic bulk micromachining process. The applicability of the measured PA signal in the characterization of semiconductors and micromechanical structures is discussed. PB - Istočno Sarajevo : Elektrotehnički fakultet C3 - InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina T1 - Transmission pulse photoacoustic set-up for characterization of solids SP - 161 EP - 164 UR - https://hdl.handle.net/21.15107/rcub_vinar_10962 ER -
@conference{ author = "Đorđević, Katarina Lj. and Galović, Slobodanka and Nešić, Mioljub and Todorović, D. and Popović, Marica and Markushev, Dragan D. and Markushev, Dragana K.", year = "2022", abstract = "Laboratory-built measuring device, based on pulse photoacoustic (PA) effect, which allows the measurement of optical and acoustic signals in time domain, is presented. The experimental setup is described and the device specifications are given in detail. Optical and PA signals are measured in a time range from 10 μs to 10 s, for different samples and conditions. As an example, the experimental results for Si square membrane (Si chip with 5 x 5 mm frame and 3 × 3 mm square membrane, 32 μm thick, used in micromechanic devices) are presented. The square membrane Si chips were prepared by wet anisotropic bulk micromachining process. The applicability of the measured PA signal in the characterization of semiconductors and micromechanical structures is discussed.", publisher = "Istočno Sarajevo : Elektrotehnički fakultet", journal = "InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina", title = "Transmission pulse photoacoustic set-up for characterization of solids", pages = "161-164", url = "https://hdl.handle.net/21.15107/rcub_vinar_10962" }
Đorđević, K. Lj., Galović, S., Nešić, M., Todorović, D., Popović, M., Markushev, D. D.,& Markushev, D. K.. (2022). Transmission pulse photoacoustic set-up for characterization of solids. in InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina Istočno Sarajevo : Elektrotehnički fakultet., 161-164. https://hdl.handle.net/21.15107/rcub_vinar_10962
Đorđević KL, Galović S, Nešić M, Todorović D, Popović M, Markushev DD, Markushev DK. Transmission pulse photoacoustic set-up for characterization of solids. in InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina. 2022;:161-164. https://hdl.handle.net/21.15107/rcub_vinar_10962 .
Đorđević, Katarina Lj., Galović, Slobodanka, Nešić, Mioljub, Todorović, D., Popović, Marica, Markushev, Dragan D., Markushev, Dragana K., "Transmission pulse photoacoustic set-up for characterization of solids" in InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina (2022):161-164, https://hdl.handle.net/21.15107/rcub_vinar_10962 .