Effect of Au/Ag ion implantation and subsequent thermal annealing on optical properties of titanium nitride thin films
Апстракт
The control of optical properties of titanium nitride is of great interest especially in the area of plasmonics where titanium nitride can successfully change and overcome most of the drawbacks of plasmonic metals [1,2]. In this study we have investigated the structural and optical changes of 260 nm thick TiN thin film induced by sequential implantation of 200 keV Au and 150 keV Ag ions. During implantation Au ion fluence was kept constant at 1.0×1016 ions/cm2 while the silver ion fluence was varied from 4.0×1016 ions/cm2 to 13×1016 ions/cm2 . After implantation the films were annealed at 500ºC, for 1 hour. The samples were analyzed by means of X-ray diffraction and spectroscopic ellipsometry measurements. The changes in dielectric function spectra of TiN induced by Au/Ag ion implantation and post-implantation annealing were analyzed and discussed in detail. The parameters of the fit including screened and unscreened plasma frequency as well as Drude broadening were studied with respec...t to the ion fluences and annealing temperature, and they were correlated with the structural changes of TiN. It was found that the real part of dielectric constant becomes less negative after implantation (Fig. 1a). Simultaneously, imaginary part decreases meaning that the titanium nitride possesses lower optical losses after implantation (Fig. 1b). Besides this, the overall metallic character of titanium nitride in the visible and near infrared region is retained. Further, we have demonstrated that subsequent annealing at 500°C continues to change the both real and imaginary part of dielectric constant in the same direction as in the case of ion implantation, thus leaving the films with much lower optical losses. Our findings suggest that the optical properties of the TiN films can be tailored by varying the ion fluence of incident metal ions as well as by post-implantation annealing processing.
Извор:
PHOTONICA2021 : 8th International School and Conference on Photonics and HEMMAGINERO workshop : Abstracts of Tutorial, Keynote, Invited Lectures, Progress Reports and Contributed Papers; August 23-27, 2021; Belgrade, 2021, 84-Издавач:
- Belgrade : Institute of Physics Belgrade
Напомена:
- VIII International School and Conference on Photonics and HEMMAGINERO workshop : PHOTONICA2021 : book of abstracts; August 23-27, 2021; Belgrade
Институција/група
VinčaTY - CONF AU - Popović, M. AU - Novaković, Mirjana M. AU - Rajić, Vladimir PY - 2021 UR - https://vinar.vin.bg.ac.rs/handle/123456789/10905 AB - The control of optical properties of titanium nitride is of great interest especially in the area of plasmonics where titanium nitride can successfully change and overcome most of the drawbacks of plasmonic metals [1,2]. In this study we have investigated the structural and optical changes of 260 nm thick TiN thin film induced by sequential implantation of 200 keV Au and 150 keV Ag ions. During implantation Au ion fluence was kept constant at 1.0×1016 ions/cm2 while the silver ion fluence was varied from 4.0×1016 ions/cm2 to 13×1016 ions/cm2 . After implantation the films were annealed at 500ºC, for 1 hour. The samples were analyzed by means of X-ray diffraction and spectroscopic ellipsometry measurements. The changes in dielectric function spectra of TiN induced by Au/Ag ion implantation and post-implantation annealing were analyzed and discussed in detail. The parameters of the fit including screened and unscreened plasma frequency as well as Drude broadening were studied with respect to the ion fluences and annealing temperature, and they were correlated with the structural changes of TiN. It was found that the real part of dielectric constant becomes less negative after implantation (Fig. 1a). Simultaneously, imaginary part decreases meaning that the titanium nitride possesses lower optical losses after implantation (Fig. 1b). Besides this, the overall metallic character of titanium nitride in the visible and near infrared region is retained. Further, we have demonstrated that subsequent annealing at 500°C continues to change the both real and imaginary part of dielectric constant in the same direction as in the case of ion implantation, thus leaving the films with much lower optical losses. Our findings suggest that the optical properties of the TiN films can be tailored by varying the ion fluence of incident metal ions as well as by post-implantation annealing processing. PB - Belgrade : Institute of Physics Belgrade C3 - PHOTONICA2021 : 8th International School and Conference on Photonics and HEMMAGINERO workshop : Abstracts of Tutorial, Keynote, Invited Lectures, Progress Reports and Contributed Papers; August 23-27, 2021; Belgrade T1 - Effect of Au/Ag ion implantation and subsequent thermal annealing on optical properties of titanium nitride thin films SP - 84 UR - https://hdl.handle.net/21.15107/rcub_vinar_10905 ER -
@conference{ author = "Popović, M. and Novaković, Mirjana M. and Rajić, Vladimir", year = "2021", abstract = "The control of optical properties of titanium nitride is of great interest especially in the area of plasmonics where titanium nitride can successfully change and overcome most of the drawbacks of plasmonic metals [1,2]. In this study we have investigated the structural and optical changes of 260 nm thick TiN thin film induced by sequential implantation of 200 keV Au and 150 keV Ag ions. During implantation Au ion fluence was kept constant at 1.0×1016 ions/cm2 while the silver ion fluence was varied from 4.0×1016 ions/cm2 to 13×1016 ions/cm2 . After implantation the films were annealed at 500ºC, for 1 hour. The samples were analyzed by means of X-ray diffraction and spectroscopic ellipsometry measurements. The changes in dielectric function spectra of TiN induced by Au/Ag ion implantation and post-implantation annealing were analyzed and discussed in detail. The parameters of the fit including screened and unscreened plasma frequency as well as Drude broadening were studied with respect to the ion fluences and annealing temperature, and they were correlated with the structural changes of TiN. It was found that the real part of dielectric constant becomes less negative after implantation (Fig. 1a). Simultaneously, imaginary part decreases meaning that the titanium nitride possesses lower optical losses after implantation (Fig. 1b). Besides this, the overall metallic character of titanium nitride in the visible and near infrared region is retained. Further, we have demonstrated that subsequent annealing at 500°C continues to change the both real and imaginary part of dielectric constant in the same direction as in the case of ion implantation, thus leaving the films with much lower optical losses. Our findings suggest that the optical properties of the TiN films can be tailored by varying the ion fluence of incident metal ions as well as by post-implantation annealing processing.", publisher = "Belgrade : Institute of Physics Belgrade", journal = "PHOTONICA2021 : 8th International School and Conference on Photonics and HEMMAGINERO workshop : Abstracts of Tutorial, Keynote, Invited Lectures, Progress Reports and Contributed Papers; August 23-27, 2021; Belgrade", title = "Effect of Au/Ag ion implantation and subsequent thermal annealing on optical properties of titanium nitride thin films", pages = "84", url = "https://hdl.handle.net/21.15107/rcub_vinar_10905" }
Popović, M., Novaković, M. M.,& Rajić, V.. (2021). Effect of Au/Ag ion implantation and subsequent thermal annealing on optical properties of titanium nitride thin films. in PHOTONICA2021 : 8th International School and Conference on Photonics and HEMMAGINERO workshop : Abstracts of Tutorial, Keynote, Invited Lectures, Progress Reports and Contributed Papers; August 23-27, 2021; Belgrade Belgrade : Institute of Physics Belgrade., 84. https://hdl.handle.net/21.15107/rcub_vinar_10905
Popović M, Novaković MM, Rajić V. Effect of Au/Ag ion implantation and subsequent thermal annealing on optical properties of titanium nitride thin films. in PHOTONICA2021 : 8th International School and Conference on Photonics and HEMMAGINERO workshop : Abstracts of Tutorial, Keynote, Invited Lectures, Progress Reports and Contributed Papers; August 23-27, 2021; Belgrade. 2021;:84. https://hdl.handle.net/21.15107/rcub_vinar_10905 .
Popović, M., Novaković, Mirjana M., Rajić, Vladimir, "Effect of Au/Ag ion implantation and subsequent thermal annealing on optical properties of titanium nitride thin films" in PHOTONICA2021 : 8th International School and Conference on Photonics and HEMMAGINERO workshop : Abstracts of Tutorial, Keynote, Invited Lectures, Progress Reports and Contributed Papers; August 23-27, 2021; Belgrade (2021):84, https://hdl.handle.net/21.15107/rcub_vinar_10905 .