@conference{
author = "Petković, Darija and Chia-Ho, Hsin and Trstenjak, Urška and Kovač, Janez and Vengust, Damjan and Spreitzer, Matjaž and Jovanović, Zoran",
year = "2023",
abstract = "Epitaxy represents a process of crystal growth or material deposition in which the new created layers have a high degree of crystallographic alignment with the substrate lattice. In this research 10 nm-thick thin films of strontium titanate (STO) were grown using pulsed laser deposition (PLD) method on Si(001) whose surface was either deoxidized with strontium oxide (SrO) or buffered by reduced graphene oxide (rGO) in combination with SrO deoxidation. In addition to differently prepared Si(001) surface, the effect of deposition temperature on the crystalline structure of the STO thin films was also examined. Reflection high energy electron diffraction (RHEED), atomic force microscopy (AFM), X-ray diffraction (XRD), X-ray reflectivity (XRR) and X-ray photoelectron spectroscopy (XPS) methods were used to examine the properties of the grown films. It was concluded that the STO thin film grown on the rGO-coated Si substrate at 515 °C shows the highest crystallinity with a smooth surface, while the film deposited on the bare silicon has amorphous structure. The STO films grown at 700 °C show textured or polycrystalline structure. Good crystallinity, epitaxial alignment, and clean interface are the major requirements for STO/Si and the STO/rGO/Si heterostructure for making an efficient and stable Si photocathode for the photoelectrochemical (PEC) water splitting. Our future work will be directed toward understanding how the obtained interfaces and crystalline structure of STO films are influencing the PEC process.",
publisher = "Belgrade : Institute of Technical Sciences of SASA",
journal = "21st Young Researchers' Conference Materials Sciences and Engineering : program and the book of abstracts",
title = "PLD growth of strontium titanate thin films on SrO-deoxidized and rGO-buffered Si(001) substrate",
pages = "60-60",
url = "https://hdl.handle.net/21.15107/rcub_vinar_12327"
}