Microstructural studies of TiN coatings prepared by PVD and MAD
Апстракт
Titanium nitride (TiN) films have been deposited by physical vapour deposition (PVD), with BALZER equipment, and ion beam assisted deposition (IBAD) process, in DANFYSIK chamber. TiN thin films were grown, during IBAD process, by evaporation of Ti in presence of N-2 and simultaneous bombarded with Ar+ ions. The evolution of the microstructure from porous and columnar grains to densel packed grains is accompanied by changes in mechanical and physical properties. (C) 2004 Elsevier B.V. All rights reserved.
Кључне речи:
coatings / ion bombardment / adhesion / X-ray scattering / diffraction and reflection / scanning electron microscopy (SEM)Извор:
Surface Science, 2004, 566, 40-44Напомена:
- 22nd European Conference on Surface Science (ECOSS 22), Sep 07-12, 2003, Prague, Czech Republic
DOI: 10.1016/j.susc.2004.06.060
ISSN: 0039-6028
WoS: 000224238200007
Scopus: 2-s2.0-4544325212
Колекције
Институција/група
VinčaTY - JOUR AU - Skoric, B AU - Kakas, D AU - Bibić, Nataša M. AU - Rakita, M PY - 2004 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6469 AB - Titanium nitride (TiN) films have been deposited by physical vapour deposition (PVD), with BALZER equipment, and ion beam assisted deposition (IBAD) process, in DANFYSIK chamber. TiN thin films were grown, during IBAD process, by evaporation of Ti in presence of N-2 and simultaneous bombarded with Ar+ ions. The evolution of the microstructure from porous and columnar grains to densel packed grains is accompanied by changes in mechanical and physical properties. (C) 2004 Elsevier B.V. All rights reserved. T2 - Surface Science T1 - Microstructural studies of TiN coatings prepared by PVD and MAD VL - 566 SP - 40 EP - 44 DO - 10.1016/j.susc.2004.06.060 ER -
@article{ author = "Skoric, B and Kakas, D and Bibić, Nataša M. and Rakita, M", year = "2004", abstract = "Titanium nitride (TiN) films have been deposited by physical vapour deposition (PVD), with BALZER equipment, and ion beam assisted deposition (IBAD) process, in DANFYSIK chamber. TiN thin films were grown, during IBAD process, by evaporation of Ti in presence of N-2 and simultaneous bombarded with Ar+ ions. The evolution of the microstructure from porous and columnar grains to densel packed grains is accompanied by changes in mechanical and physical properties. (C) 2004 Elsevier B.V. All rights reserved.", journal = "Surface Science", title = "Microstructural studies of TiN coatings prepared by PVD and MAD", volume = "566", pages = "40-44", doi = "10.1016/j.susc.2004.06.060" }
Skoric, B., Kakas, D., Bibić, N. M.,& Rakita, M.. (2004). Microstructural studies of TiN coatings prepared by PVD and MAD. in Surface Science, 566, 40-44. https://doi.org/10.1016/j.susc.2004.06.060
Skoric B, Kakas D, Bibić NM, Rakita M. Microstructural studies of TiN coatings prepared by PVD and MAD. in Surface Science. 2004;566:40-44. doi:10.1016/j.susc.2004.06.060 .
Skoric, B, Kakas, D, Bibić, Nataša M., Rakita, M, "Microstructural studies of TiN coatings prepared by PVD and MAD" in Surface Science, 566 (2004):40-44, https://doi.org/10.1016/j.susc.2004.06.060 . .