Periodic surface structures on crystalline silicon created by 532 nm picosecond Nd : YAG laser pulses
Апстракт
Creation of laser-induced morphology features, particularly laser-induced periodic surface structures (LIPSS), by a 532 nm picosecond Nd:YAG laser on crystalline silicon is reported. The LIPSS, often termed ripples,. were produced at average laser irradiation fluences of 0.7, 1.6, and 7.9 J cm(-2). Two types of ripples were registered: micro-ripples (at micrometer scale) in the form of straight parallel lines extending over the entire irradiated spot, and nano-ripples (at nanometer scale), apparently concentric, registered only at the rim of the spot, with the periodicity dependent on laser fluence. There are indications that the parallel ripples are a consequence of the partial periodicity contained in the diffraction modulated laser beam, and the nano-ripples are very likely frozen capillary waves. The damage threshold fluence, was estimated at 0.6 J cm(-2). (c) 2007 Elsevier B.V. All rights reserved.
Кључне речи:
surface modification / micro-ripples / nano-ripples / silicon / picosecond laserИзвор:
Applied Surface Science, 2007, 254, 5, 1377-1381
DOI: 10.1016/j.apsusc.2007.06.050
ISSN: 0169-4332
WoS: 000251899400005
Scopus: 2-s2.0-36348998527
Колекције
Институција/група
VinčaTY - JOUR AU - Trtica, Milan AU - Gaković, Biljana M. AU - Radak, Bojan AU - Batani, Dimitri AU - Desai, T. AU - Bussoli, M. PY - 2007 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3336 AB - Creation of laser-induced morphology features, particularly laser-induced periodic surface structures (LIPSS), by a 532 nm picosecond Nd:YAG laser on crystalline silicon is reported. The LIPSS, often termed ripples,. were produced at average laser irradiation fluences of 0.7, 1.6, and 7.9 J cm(-2). Two types of ripples were registered: micro-ripples (at micrometer scale) in the form of straight parallel lines extending over the entire irradiated spot, and nano-ripples (at nanometer scale), apparently concentric, registered only at the rim of the spot, with the periodicity dependent on laser fluence. There are indications that the parallel ripples are a consequence of the partial periodicity contained in the diffraction modulated laser beam, and the nano-ripples are very likely frozen capillary waves. The damage threshold fluence, was estimated at 0.6 J cm(-2). (c) 2007 Elsevier B.V. All rights reserved. T2 - Applied Surface Science T1 - Periodic surface structures on crystalline silicon created by 532 nm picosecond Nd : YAG laser pulses VL - 254 IS - 5 SP - 1377 EP - 1381 DO - 10.1016/j.apsusc.2007.06.050 ER -
@article{ author = "Trtica, Milan and Gaković, Biljana M. and Radak, Bojan and Batani, Dimitri and Desai, T. and Bussoli, M.", year = "2007", abstract = "Creation of laser-induced morphology features, particularly laser-induced periodic surface structures (LIPSS), by a 532 nm picosecond Nd:YAG laser on crystalline silicon is reported. The LIPSS, often termed ripples,. were produced at average laser irradiation fluences of 0.7, 1.6, and 7.9 J cm(-2). Two types of ripples were registered: micro-ripples (at micrometer scale) in the form of straight parallel lines extending over the entire irradiated spot, and nano-ripples (at nanometer scale), apparently concentric, registered only at the rim of the spot, with the periodicity dependent on laser fluence. There are indications that the parallel ripples are a consequence of the partial periodicity contained in the diffraction modulated laser beam, and the nano-ripples are very likely frozen capillary waves. The damage threshold fluence, was estimated at 0.6 J cm(-2). (c) 2007 Elsevier B.V. All rights reserved.", journal = "Applied Surface Science", title = "Periodic surface structures on crystalline silicon created by 532 nm picosecond Nd : YAG laser pulses", volume = "254", number = "5", pages = "1377-1381", doi = "10.1016/j.apsusc.2007.06.050" }
Trtica, M., Gaković, B. M., Radak, B., Batani, D., Desai, T.,& Bussoli, M.. (2007). Periodic surface structures on crystalline silicon created by 532 nm picosecond Nd : YAG laser pulses. in Applied Surface Science, 254(5), 1377-1381. https://doi.org/10.1016/j.apsusc.2007.06.050
Trtica M, Gaković BM, Radak B, Batani D, Desai T, Bussoli M. Periodic surface structures on crystalline silicon created by 532 nm picosecond Nd : YAG laser pulses. in Applied Surface Science. 2007;254(5):1377-1381. doi:10.1016/j.apsusc.2007.06.050 .
Trtica, Milan, Gaković, Biljana M., Radak, Bojan, Batani, Dimitri, Desai, T., Bussoli, M., "Periodic surface structures on crystalline silicon created by 532 nm picosecond Nd : YAG laser pulses" in Applied Surface Science, 254, no. 5 (2007):1377-1381, https://doi.org/10.1016/j.apsusc.2007.06.050 . .